UltraFlex 200 系列设备应⽤于 6 / 8 ⼨硅、碳化硅等⾼温氧化、退⽕、常压合⾦、 Polyimide 固化等⼯艺。
UltraFlex 200 series is used in high-temperature oxidation, annealing, atmospheric-pressure alloying, and polyimide (PI) curing processes for 6-inch and 8-inch silicon, silicon carbide (SiC), and other substrates.